Triple Gauge - Model EGT
EBARA Technologies, Inc. Triple gauges combine the measurement range of a Pirani gauge, the high vacuum measurement range of a hot cathode ionization gauge and the gas independent atmospheric accuracy of a capacitance gauge. The gauges can be controlled via rack mount power supply/display units or can be powered by the user while utilizing the gauge output or the optional gauge mounted display. EBARA Technologies, Inc. Triple gauges are available with either KF or CF flanges. EBARA Technologies, Inc. Triple gauges would typically be used in high vacuum applications that require accuracy at atmosphere such as a high vacuum loadlock.