EBARA has full vacuum pump repair and remanufacturing capabilities for all types of pumps including EBARA and non-EBARA dry, wet, turbomolecular vacuum pumps. We remanufacture the products to the OEM specs. Ebara Technologies, Inc. is an authorized Osaka Vacuum USA repair provider.

EBARA’S vacuum pump replacement options

  • Repair & Return
  • Advanced Exchange
  • Trade in & Upgrade


EBARAClean is an enhanced parts cleaning and assembly solution that exists to extend parts use and performance with superior cost savings. EBARA offers a wide range of parts cleaning capabilities ranging from media blasting to ultrasonic cleaning. The fully customizable EBARAClean kit management system enables our customers to extend the life of their parts, create a more predictable PM schedule and most importantly cut operation costs by refurbishing and recycling existing parts and assemblies.

EBARA’s ISO Quality Assurance program guarantees your parts will be treated with the utmost care providing a complete critical dimension report that meets your needs. EBARAClean provides fast, consistent, reliable cleaning services. EBARA Technologies is committed to providing a total sub-fab solution based on servicing your products, enabling the end-user to focus on what you do best manufacturing!


EBARA Technologies, Inc. offers a world-class training experience for vacuum pumps and abatement systems. The mix of classroom and hands-on experience will train you to understand the tool functions as well as perform what you’ve learned. We want you to walk away from their training with both confidence in and excitement about your EBARA products.

  • Located in Sacramento, CA
  • Staffed by EBARA’s Industry-Leading Engineering Group
  • Performance Based Equipment Training (PBET)