Vacuum Pump Maintenance

Onsite Field Service & Repairs by EBARA’s Components Division

EBARA’s Components Division onsite field services is widely recognized by OEMs as a leader in vacuum pump maintenance and related equipment services. EBARA’s awarding winning service group consists of factory-trained field service technicians at numerous strategic locations throughout North America. We provide service to non-EBARA products as well as our own.

EBARA offers a wide-range of vacuum pump maintenance packages that can be customized to meet your operational requirements. EBARA provides pump maintenance and repair solutions such as manpower, guaranteed up-time, spare and consumable parts management, logistics and data analysis.

To schedule an appointment for field repairs, please call 800-535-5376.


  • Commission and Start-up of Equipment
  • On-site Training
  • Managed Equipment Maintenance Program
  • Clearly Defines the Preventive Maintenance Intervals and Safety Stock/Parts Inventory Requirements
  • Planned Programs Give a Guaranteed Cost to Maintain the Equipment On-site
  • Monitored Performance (Predictive Maintenance) Programs Maximize Life and Reduce Costs
  • On-line RMA Program

Service Contract Benefits:

  • System Up Time Guarantee
  • Response Time Guarantee
  • On-site Field Service
  • Customized Site Plans Including Preventative Maintenance Scheduled
  • 24/7/365 Technical Support at 800-535-5376
  • Customized Training