Vacuum Gauges

EBARA has ready-to-go on-hand availability of many of our most popular gauges and controllers. The EBARA Pirani Gauge, Pirani-Capacitance Gauge (7.5 Torr to atmosphere), Pirani-Ion Gauge (3.8 x 10-10 Torr to atmosphere), and the “Total One” Pirani-Capacitance-Ion Gauge (3.8 x 10-10 to 1125 Torr) employ the most advanced digital Pirani, Capacitance, and Ion technology available in the marketplace. The rugged, stainless steel sensor cell and compact design allow our gauges to be used on semiconductor systems, and other standard applications, such as for vacuum and general vacuum lines.
Let us help you combine gauge technologies to reduce the complexity of your setup and installation. Gauges such as the EGP500-0000, EGPC550-0104, EGPI400-2020, and many more are in stock and ready to fulfill your needs. Controllers such as the EGC-1000 are also available. Contact us today for availability!