EVIS™ Rack System Takes Integrated Vacuum
& Abatement to the Next Level
EBARA Technologies continues to redefine sub-fab efficiency with the EVIS™ Integrated Vacuum & Abatement System, a compact solution engineered to reduce cost, footprint, and downtime while improving overall fab performance. By integrating dry vacuum pumps and combustion abatement into a single platform, EVIS™ eliminates exhaust heater jackets, reduces facility connections and exhaust piping, minimizes or eliminates nitrogen dilution, and simplifies maintenance. The result is lower CAPEX and OPEX, increased uptime, and a smaller equipment footprint, helping semiconductor manufacturers maximize productivity while reducing total cost of ownership.
Beyond cost savings, EVIS™ improves equipment uptime through simplified maintenance, automatic water flush technology, and reduced byproduct buildup. Its flexible architecture supports both single-pump and multi-pump configurations while dramatically reducing the overall equipment footprint, making it an ideal solution for advanced semiconductor manufacturing facilities where every square foot matters.
With increasing demand for sustainable manufacturing solutions, EVIS™ demonstrates Ebara Technologies’ commitment to delivering integrated technologies that improve productivity, reduce operating costs, and help customers prepare for the next generation of semiconductor fabrication.
ETI Celebrates Micron’s Historic
Memory Manufacturing Milestone
Ebara Technologies Inc. proudly joined Micron Technology in celebrating the successful launch of the 1α (1-alpha) DRAM, recognized as the most advanced memory technology ever manufactured in the United States. Representing ETI were President & CEO Sachin Paradkar and Vice President, Global Strategic Account Jameel Mussa, who participated alongside Micron leadership, industry partners, and government officials.
This milestone reinforces the importance of domestic semiconductor manufacturing and highlights the strong collaboration between ETI and Micron as both companies continue advancing next-generation technologies that support critical industries across the United States.
Sachin Paradkar | Jameel Mussa
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Upcoming Events
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- Date: October 13-15, 2026
