EXHAUST MANAGEMENT SOLUTIONS FOR THE COMPOUND SEMICONDUCTOR INDUSTRY

EBARA is a leading supplier of specialty vacuum products for the Compound Semiconductor Industry. Compound semiconductor is based on metalorganic compounds with elements from different groups of the periodic table, e.g. GaN, GaAs, InP, SiC. Where most applications employ sophisticated processes, such as Metal Organic Chemical Vapor Deposition (MOCVD), Molecular Beam Epitaxy (MBE) and Hydride Vapour Phase Epitaxy (HVPE).

Key players in many of today’s fastest growing market segments include;

• LEDs for FPD backlighting
• Solid state lighting
• Traffic lighting
• High performance lasers for blue ray discs or industrial applications.
• Future markets are in the area of General Lighting, Photovoltaic and OLED.

Harmful gases are generated in the manufacturing processes of various products, such as chemicals, materials, and electronic components. Gas abatement systems use a variety of methods, including combustion and catalysis, to detoxify harmful gases. Demand has been growing for gas abatement systems in recent years from the perspective of environmental protection.

EBARA offers an extensive range of gas abatement systems to suit the different types of gases to be treated and the environment of use. They include combustion models that are able to treat multiple flammable gases at a time with high efficiency, and dry models that eliminate the need for fuel supply and the disposal of wastewater.