Photovoltaic

Photovoltaic Production Solutions

EBARA’s Dry Vacuum Pumps and Gas Abatement Systems provide standard and customized solutions for photovoltaic production. Our photovoltaic production solutions, including dry vacuum pumps, turbomolecular pumps, burner washers and wet scrubbers, can reliably and cost effectively handle the requirements of the silicon wafer and thin film Photovoltaic industry.