SemiConductor

SemiConductor

Products & Services for the Semiconductor Industry

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Compound Semiconductor

Compound Semiconductor

Vacuum and Exhaust Management Solutions for the Compound Semiconductor Market

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Solar/Photovoltaic

Solar/Photovoltaic

Vacuum and Exhaust Management Solutions for the Solar/Photovoltaic Market

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General Vacuum

General Vacuum

Serving Markets that Utilize Vacuum Technology

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Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.

  • Dry Vacuum Pumps
  • Turbomolecular Pumps
  • Point-of-Use Abatement
  • Exhaust Heaters & Traps
  • Vacuum Hardware
  • Related services

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.

  • Chemical Mechanical Polishing (CMP)
  • Wafer Plating Systems
  • Bevel and Backside Clean Treatment Systems
  • Adjust alignment of upcoming events section on bottom of home page.

Product Spotlight

Dry Vacuum Pumps - EV-A Series

The Model EV-A series air-cooled dry vacuum pumps have industry-leading specifications. The non-contact, multi-staged roots are designed for reliable, particle-free vacuum generation.

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Key Benefits of Choosing Our Products

Low Energy Consumption

Low Energy Consumption

Our high-efficiency products reduce overall energy consumption.

High Pumping Speeds

High Pumping Speeds

Our products have high pumping speeds at atmosphere

Low Noise

Low Noise

Our latest enhancements include low noise and low vibration

Low Cost of Ownership

Low Cost of Ownership

Our models have low cost of ownership [Power, N2, Water, Footprint, Volume, Weight]