Products & Services for the Semiconductor Industry
Vacuum and Exhaust Management Solutions for the Compound Semiconductor Market
Vacuum and Exhaust Management Solutions for the Solar/Photovoltaic Market
Serving Markets that Utilize Vacuum Technology
The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.
The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.
The Model EV-A series air-cooled dry vacuum pumps have industry-leading specifications. The non-contact, multi-staged roots are designed for reliable, particle-free vacuum generation.
Our high-efficiency products reduce overall energy consumption.
Our products have high pumping speeds at atmosphere
Our latest enhancements include low noise and low vibration
Our models have low cost of ownership [Power, N2, Water, Footprint, Volume, Weight]
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