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Vacuum Pump & Semiconductor Systems

EBARA Technologies – Components Division

EBARA Technologies’ Components Division supplies advanced vacuum and abatement technologies used in the manufacturing of semiconductors and photovoltaics, and in R&D. EBARA Technologies provides leading edge exhaust management solutions consisting of dry vacuum pumps, turbomolecular pumps, point-of-use abatement, exhaust line heaters, vacuum hardware and related services.

EBARA Technologies – Systems Division

EBARA Technologies’ Systems Division supplies advanced technologies used in front-end and back-end semiconductor manufacturing. EBARA is a leading supplier of 200 mm and 300mm Chemical Mechanical Polishing systems (CMP), advanced Wafer Plating Systems, Bevel and Backside Clean Treatment Systems.
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