SemiConductor

SemiConductor

Products & Services for the Semiconductor Industry

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Compound Semiconductor

Compound Semiconductor

Vacuum and Exhaust Management Solutions for the Compound Semiconductor Market

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Solar/Photovoltaic

Solar/Photovoltaic

Vacuum and Exhaust Management Solutions for the Solar/Photovoltaic Market

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General Vacuum

General Vacuum

Serving Markets that Utilize Vacuum Technology

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An EBARA Precision
Machinery Company

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Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.

  • Dry Vacuum Pumps
  • Turbomolecular Pumps
  • Point-of-Use Abatement
  • Exhaust Heaters & Traps
  • Vacuum Hardware
  • Related services

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.

  • Chemical Mechanical Polishing (CMP)
  • Wafer Plating Systems
  • Bevel and Backside Clean Treatment Systems
  • Adjust alignment of upcoming events section on bottom of home page.

dry pump

Product Spotlight

 

The EBARA EV-A Series are compact, air-cooled dry pumps that are perfect replacements for scroll pumps and wet pumps.

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Key Benefits of Choosing Our Products

Low Energy Consumption

Low Energy Consumption

Our high-efficiency products reduce overall energy consumption.

High Pumping Speeds

High Pumping Speeds

Our products have high pumping speeds at atmosphere

Low Noise

Low Noise

Our latest enhancements include low noise and low vibration

Low Cost of Ownership

Low Cost of Ownership

Our models have low cost of ownership [Power, N2, Water, Footprint, Volume, Weight]

Upcoming Events

Nov26
MRS Fall

MRS Fall
Boston, MA
Nov 26 - Dec 1, 2017
Booth #606

SESHA
Scottsdale, AZ
Apr 16 - Apr 20, 2018

ASMS
San Diego, CA
Jun 3 - Jun 7, 2018

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