SemiConductor

SemiConductor

Products & Services for the Semiconductor Industry

Learn More

Compound Semiconductor

Compound Semiconductor

Vacuum and Exhaust Management Solutions for the Compound Semiconductor Market

Learn More

Solar/Photovoltaic

Solar/Photovoltaic

Vacuum and Exhaust Management Solutions for Solar Manufacturing

Learn More

General Vacuum

General Vacuum

Serving Markets that Utilize Vacuum Technology

Learn More

An EBARA Precision
Machinery Company

Some Image

Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.

  • Dry Vacuum Pumps
  • Turbomolecular Pumps
  • Point-of-Use Abatement
  • Exhaust Heaters & Traps
  • Vacuum Hardware
  • Related services

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.

  • Chemical Mechanical Polishing (CMP)
  • Wafer Plating Systems
  • Bevel and Backside Clean Treatment Systems

Product Spotlight

 

The Ebara DOU-SC utilizes a dynamic oxidation and water scrubbing system that is safe, efficient and cost effective

Learn More

Key Benefits of Choosing Our Products

Low Energy Consumption

Low Energy Consumption

Our high-efficiency products reduce overall energy consumption.

High Pumping Speeds

High Pumping Speeds

Our products have high pumping speeds at atmosphere

Low Noise

Low Noise

Our latest enhancements include low noise and low vibration

Low Cost of Ownership

Low Cost of Ownership

Our models have low cost of ownership [Power, N2, Water, Footprint, Volume, Weight]

Upcoming Events

Jul10
SEMICON West

SEMICON West
San Francisco, CA
Jul 10 - Jul 12, 2018

National AVS
Long Beach, CA
Oct 21 - Oct 26, 2018

View Events Page