The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D. Components Division: Dry Vacuum Pumps, Turbomolecular Pumps, Point-of-Use Abatement, Exhaust Heaters & Traps, Vacuum Hardware, Related services
The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm. Systems Division: Chemical Mechanical Polishing (CMP), Wafer Plating Systems, Bevel and Backside Clean Treatment Systems
The VSN® Temperature Control System supplies a complete network of temperature control by providing an Operator Interface Panel and PID VSN® Modules to each heater.
The VSN® (Vision) heater control system is designed to make monitoring and controlling all of your thermal solutions simple. With a multi-color, high visibility LED “eye” built into each VSN® Module, and red LED display, you can take one look at your heaters and know the current status.
For applications where additional control is needed, The Operator Interface includes Ethernet and Wi-Fi capabilities which allow for Modbus communications for remote access and even email alerts for current heater status.
The VSN® system is ETL approved to UL and CSA standards, in addition to being CE marked.
See your future in Thermal Solutions with EBARA Vision (VSN®)
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