SemiConductor

SemiConductor

Products & Services for the Semiconductor Industry

Learn More

Compound Semiconductor

Compound Semiconductor

Vacuum and Exhaust Management Solutions for the Compound Semiconductor Market

Learn More

Solar/Photovoltaic

Solar/Photovoltaic

Vacuum and Exhaust Management Solutions for the Solar/Photovoltaic Market

Learn More

General Vacuum

General Vacuum

Serving Markets that Utilize Vacuum Technology

Learn More

An EBARA Precision
Machinery Company

Some Image

Components Division

The Ebara Technologies, Inc. Components Division supplies advanced vacuum and abatement technologies focused on semiconductor, photovoltaic and R&D.

  • Dry Vacuum Pumps
  • Turbomolecular Pumps
  • Point-of-Use Abatement
  • Exhaust Heaters & Traps
  • Vacuum Hardware
  • Related services

Systems Division

The Ebara Technologies, Inc. Systems Division supplies advanced technologies to front-end and back-end semiconductor manufacturing for 200 mm and 300mm.

  • Chemical Mechanical Polishing (CMP)
  • Wafer Plating Systems
  • Bevel and Backside Clean Treatment Systems
  • Adjust alignment of upcoming events section on bottom of home page.

Join Ebara Technologies in supporting the American Red Cross.

Learn More

Donate Now

 

Key Benefits of Choosing Our Products

Low Energy Consumption

Low Energy Consumption

Our high-efficiency products reduce overall energy consumption.

High Pumping Speeds

High Pumping Speeds

Our products have high pumping speeds at atmosphere

Low Noise

Low Noise

Our latest enhancements include low noise and low vibration

Low Cost of Ownership

Low Cost of Ownership

Our models have low cost of ownership [Power, N2, Water, Footprint, Volume, Weight]

Upcoming Events

Apr17
SESHA

SESHA
Scottsdale, AZ
Apr 17 - Apr 21, 2017
Booth 16

Argonne
Lemont, IL
May 8 - May 10, 2017

View Events Page